Replacement low-k spacer

ABSTRACT

A semiconductor structure including a semiconductor material portion located on a substrate and extending along a lengthwise direction, a gate stack overlying a portion of the semiconductor material portion, and a first low-k spacer portion and a second low-k spacer portion abutting the gate stack and spaced from each other by the gate stack along said lengthwise direction. The first low-k spacer portion and the second low-k spacer portion each part of a recessed dummy gate structure on the substrate and a sacrificial spacer with gaps around and above a portion of the dummy gate stack. The gaps are filled in with the first low-k spacer portion and the second low-k spacer portion.

BACKGROUND

Fin field effect transistors (FinFETs) typically include a source regionand a drain region interconnected by fins which serve as a channelregion of the device and a gate that surrounds at least a portion ofeach of the fins between the source region and the drain region.Epitaxial deposition is typically used to form the source region and thedrain region. As transistors continue to be reduced in size and have anincreased number of transistors per unit of microchip, a metal-oxidesemiconductor (MOS) FET (MOSFET) pitch of the transistors scales down(e.g., under 100 nm) and a thickness of a silicon nitride spacer of agate structure also scales to provide a large enough contact area for asource/drain. A thinner spacer induces higher parasitic capacitance thatcan reduce processing speed. The parasitic capacitance may cause slowerring oscillator (RO) speed and eventually lower circuit workingfrequency. With higher effective capacitance (C_(EFF)) of RO, circuitperformance may degrade and there may be higher power consumption duringdynamic operation. In order to reduce C_(EFF), low-k dielectrics, i.e.,materials with a dielectric constant lower than silicon nitride, may beused to form the gate spacer. Typical low-k materials include SiBN, SiCNand SiBCN. Two integration processes can be used to integrate low-kdielectrics as a gate spacer. In a low-k spacer-first approach, aftergate deposition and etch, a low-k dielectric is conformally depositedand then etched using an anisotropic etch process such as reactive ionetching (RIE). An issue with a low-k spacer first results inCarbon/Boron loss during spacer reactive ion etch (RIE) and epitaxialdeposition, which can increase the value of K. Alternatively, a low-kspacer-last process can be used, where a sacrificial spacer, such assilicon nitride, is first formed, and is subsequently removed after allhigh temperature processes (typically >600° C.) in the integration floware executed. The gap formed as a result of sacrificial spacer removalis then filled with a low-K dielectric. An issue with a low-kspacer-last is that the aspect ratio (a structure's height relative toits width) of the sacrificial spacer is too high, and it is not easy toetch down the sacrificial spacer without damaging the oxide inter-layerdielectric (ILD) and dummy polysilicon gate.

SUMMARY

One or more embodiments relate to field effect transistors includinglow-k spacers for low capacitance and a method of manufacturing thesame. In one embodiment, a semiconductor structure includes asemiconductor material portion located on a substrate and extendingalong a lengthwise direction, a gate stack overlying a portion of thesemiconductor material portion, and a first low-k spacer portion and asecond low-k spacer portion abutting the gate stack and spaced from eachother by the gate stack along said lengthwise direction. The first low-kspacer portion and the second low-k spacer portion each part of arecessed dummy gate structure on the substrate and a sacrificial spacerwith gaps around and above a portion of the dummy gate stack. The gapsare filled in with the first low-k spacer portion and the second low-kspacer portion.

These and other features, aspects and advantages of the embodiments willbecome understood with reference to the following description, appendedclaims and accompanying figures.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of an exemplary structure afterformation of a deposited and patterned dummy gate stack on a substrateaccording to an embodiment;

FIG. 2 is a cross-sectional view of the exemplary structure afterformation of sacrificial spacers, according to an embodiment;

FIG. 3 is a cross-sectional view of the exemplary structure afterformation of source and drain junctions, according to an embodiment;

FIG. 4 is a cross-sectional view of the exemplary structure afterdepositing and chemical mechanical planarization (CMP) of inter-layerdielectric (ILD) oxide, according to an embodiment;

FIG. 5 is a cross-sectional view of the exemplary structure afterperforming a dummy gate stack poly partial recess process, according toan embodiment;

FIG. 6. is a cross-sectional view of the exemplary structure afterperforming etching on the sacrificial spacers, according to anembodiment;

FIG. 7 is a cross-sectional view of the exemplary structure afterperforming an over etch removing the sacrificial spacers, according toan embodiment;

FIG. 8 is a cross-sectional view of the exemplary structure afterformation low-k spacer deposition, according to an embodiment;

FIG. 9 is a cross-sectional view of the exemplary structure after low-kspacer etching, according to an embodiment of the present disclosure;

FIG. 10 is a cross-sectional view of the exemplary structure afterperforming dummy gate stack poly pull process, according to anembodiment;

FIG. 11 is a cross-sectional view of the exemplary structure afterperforming multiple depositions for forming an RMG stack, according toan embodiment;

FIG. 12 is a cross-sectional view of the exemplary structure afterrecessing the RMG stack, according to an embodiment;

FIG. 13 is a cross-sectional view of an exemplary structure afterdepositing a nitride cap and performing CMP to stop on the oxide layer,according to an embodiment;

FIG. 14 is a cross-sectional view of another exemplary structure afteretching the low-k spacers and depositing a nitride cap and performingCMP to stop on the oxide layer, according to an embodiment;

FIG. 15 is a cross-sectional view of yet another exemplary structureafter depositing a low-k material cap, according to an embodiment; and

FIG. 16 illustrates a block diagram for a process for forming asemiconductor with low-k spacers formed prior to RMG stack formation,according to one embodiment.

DETAILED DESCRIPTION

The descriptions of the various embodiments of the embodiments have beenpresented for purposes of illustration, but are not intended to beexhaustive or limited to the embodiments disclosed. Many modificationsand variations will be apparent to those of ordinary skill in the artwithout departing from the scope and spirit of the describedembodiments. The terminology used herein was chosen to best explain theprinciples of the embodiments, the practical application or technicalimprovement over technologies found in the marketplace, or to enableothers of ordinary skill in the art to understand the embodimentsdisclosed herein.

As used herein, a “lengthwise” element is an element that extends alonga corresponding lengthwise direction, and a “widthwise” element is anelement that extends along a corresponding widthwise direction.

FIG. 1 is a cross-sectional view of an exemplary structure afterformation of a deposited and patterned dummy gate stack on a substrate100 according to an embodiment. In one example, the dummy gate stackincludes at least a vertical stack of an insulator layer 110 and asemiconductor material layer 120 (e.g., amorphous Si layer, poly-Silayer, etc., as an electrode). In one embodiment, the substrate 100 maybe a semiconductor-on-insulator (SOI) substrate (e.g., fully-depletedSOI, partially depleted SOI, etc.). In other embodiments, the substrate100 may be a bulk Fin field effect transistor (FinFET), SOI FinFET,Nanowire, etc. In one embodiment, the dummy stack may be formed usingconventional techniques, such as isolation, deposition and patterningprocesses. In one embodiment, the insulator layer 110 may includeexemplary dielectric materials, for example include, silicon oxide,silicon nitride, and silicon oxynitride. The thickness of the insulatorlayer 110 can be from 1 nm to 5 nm, although lesser and greaterthicknesses can also be employed.

FIG. 2 is a cross-sectional view of the exemplary structure afterformation of sacrificial spacers including at least a first sacrificialspacer portion 210 and a second sacrificial spacer portion 211,according to an embodiment. In one embodiment, the sacrificial spacersare formed by conformal deposition of a dielectric material layer (e.g.,silicon nitride) and performing an anisotropic etch process that removeshorizontal portions of the dielectric material layer. In one embodiment,the sacrificial spacers may have a thickness in a range from 5 nm to 20nm, although lesser and greater thicknesses may also be employed.

FIG. 3 is a cross-sectional view of the exemplary structure afterformation of source junction 310 and a drain junction 320, according toan embodiment. In one embodiment, an ion implant, growth of epitaxiallayers, etc., may be employed to form the source junction 310 and thedrain junction 320. In one example, the source junction and the drainjunction are raised source/drain junctions (as shown in FIG. 3).

FIG. 4 is a cross-sectional view of the exemplary structure afterdepositing and chemical mechanical planarization (CMP) of inter layerdielectric (ILD) oxide layer portions 410 and 411, according to anembodiment. In one embodiment, the CMP stops on the semiconductormaterial layer 120. In some embodiments, the semiconductor materiallayer 120 (gate electrode) may have a cap layer (e.g., nitride) on top(e.g., on top of poly-silicon). In one example, CMP may be used topolish ILD layer portions 410 and 411 to be substantially flat with thetop of the nitride cap. When an etch process is used to remove thenitride cap, an additional optional CMP may be used to make ILD oxidelayer portions 410 and 411 flat with the top of the semiconductormaterial layer 120 (e.g., poly-silicon). The resulting structure at thispoint is the same whether or not a nitride cap is used in the processflow.

FIG. 5 is a cross-sectional view of the exemplary structure afterperforming a dummy gate stack poly partial recess process, according toan embodiment. In one embodiment, the poly partial recess process formsa partial recess 510 by removal of a portion of the semiconductormaterial layer 120 of the dummy gate stack leaving the remaining portion520 of the semiconductor material layer 120.

FIG. 6 is a cross-sectional view of the exemplary structure afterperforming etching on the first sacrificial spacer portion 210 and thesecond sacrificial spacer portion 211, according to an embodiment. Inone embodiment, the etching of the first sacrificial spacer portion 210and the second sacrificial spacer portion 211 removes the sacrificialspacer material down to the remaining portion 520 of the dummy gatestack. In one example, the remaining sacrificial spacer portions 610 and611 have a height at or near the height of the remaining portion 520.

FIG. 7 is a cross-sectional view of the exemplary structure afterperforming an over etch removing the sacrificial spacer remainingportions 610 and 611, according to an embodiment. In one embodiment,recesses (or gaps) 710 and 711 are formed after the over etch. In oneexample, the recess of the semiconductor layer 120 and the etching ofthe first sacrificial spacer portion 210 and a second sacrificial spacerportion 211, and then over etch of the sacrificial spacer remainingportions 610 and 611 are easy to perform as the aspect ratio wasreduced. The aspect ratio refers to a structure's height relative to itswidth. Structures on the substrate 100 can be characterized by an aspectratio. Defined spaces, such as trenches, holes, vias, etc., can also bedefined by an aspect ratio. As can be seen, the over etch leaves thegaps around and above the remaining portion 520.

FIG. 8 is a top-down view of the exemplary structure after formationlow-k spacer deposition, according to an embodiment. In one embodiment,a low-k spacer material 810 is deposited through any suitable techniquessuch as chemical vapor deposition (CVD), atomic layer deposition (ALD),and spin-on coating into the recesses 710 and 711, over the remainingportion 520, and on the top of and inter portions of the oxide layers410 and 411. Thus, a low-k spacer(s) are formed to fill gaps around theremaining portion 520 and extending vertically along the sidewall of thegate cavity. In one embodiment, a low-k spacer is a spacer having adielectric constant less than the dielectric constant of silicon nitrideat room temperature, e.g., 7.0 or less, and preferably about, e.g., 5.0.Some examples of low-k materials may include, but are not limited to,silicon boron nitride (SiBN), silicon carbon nitride (SiCN), siliconboron carbon nitride (SiBCN), hydrogen silsesquioxane polymer (HSQ),methyl silsesquioxane polymer (MSQ), polyphenylene oligomer, methyldoped silica or SiOx(CH3)y, SiCxOyHy or SiOCH, organosilicate glass(SiCOH) and porous SiCOH, silicon oxide, boron nitride, siliconoxynitride, etc.

FIG. 9 is a cross-sectional view of the exemplary structure after low-kspacer etching, according to an embodiment of the present disclosure. Inone embodiment, the low-k spacer material 810 is etched on the sidewalls and down below the remaining portion 520 to create a profile forthe remaining low-k material 910, which is also removed from the top ofthe oxide layers 410 and 411. In one embodiment, the profile that iscreated from the low-k spacer material etch is in such a way that thecavity 510 formed between the remaining low-k material 910 is wider atits top than its bottom and is ideal for work function metal (WFM) filland multiple depositions that are performed later for creation of theRMG structure. In one embodiment, the remaining low-k material 910includes a first low-k spacer portion that has a constant width from atop portion to a bottom portion, and a second low-k spacer portion thathas a width that tapers from a bottom portion to a top portion.

FIG. 10 is a cross-sectional view of the exemplary structure afterperforming dummy gate stack poly pull process, according to anembodiment. In one embodiment, the remaining portion 520 from the dummygate stack is pulled and removed from the structure leaving the recess1010. The recess 1010 is wider at its top than its bottom and is idealfor work function metal (WFM) fill and multiple depositions that areperformed later for creation of the RMG structure.

FIG. 11 is a cross-sectional view of the exemplary structure afterperforming multiple depositions for forming an RMG stack, according toan embodiment. In one embodiment, the RMG stack 1120 is formed after thelow-k etching creating the remaining low-k material 910 from processes,such as high-k gate dielectric deposition, WFM (e.g., TiN, TaN, TaAlN,etc.) deposition, low resistance metal (e.g. Al, W, etc.) deposition,CMP stopping on ILD oxide of the oxide layers 1110 and 1111, etc. In oneembodiment, the low-k remaining portion 910 forms the low-k spacers forthe RMG structure. It is noted that the RMG materials are not depictedseparately for simplicity, but should be understood by contemporary RMGformation processing.

In one embodiment, the gate dielectric of the RMG stack 1120 is composedof a high-k material having a dielectric constant greater than siliconoxide. Exemplary high-k materials include, but are not limited to, HfO₂,ZrO₂, La₂O₃, Al₂O₃, TiO₂, SrTiO₃, LaAlO₃, Y₂O₃, HfOxNy, ZrO_(x)La₂O_(x)N_(y), Al₂OxNy, TiOxNy, SrTiOxNy, LaAlOxNy, Y₂0xNy, SiON, SiNx,a silicate thereof, and an alloy thereof. Each value of x isindependently from 0.5 to 3 and each value of y is independently from 0to 2.

In one embodiment, the gate cavity formed with the multiple depositions,etc. to form the RMG stack 1120 may be filled with at least oneconductive material, such as at least one metallic material and/or atleast one doped semiconductor material. Examples of the conductive metalinclude, but are not limited to, Al, W, Cu, Pt, Ag, Au, Ru, Ir, Rh andRe, alloys of a conductive metal, e.g., Al—Cu, metal nitrides orcarbides such as AN, TiN, TaN, TiC and TaC, silicides of a conductivemetal, e.g., W silicide, and Pt silicide, and combinations thereof. Thegate electrode of the RMG stack 1120 can be formed by depositing theconductive material utilizing a conventional deposition process such as,for example, atomic layer deposition (ALD), chemical vapor deposition(CVD), metalorganic chemical vapor deposition (MOCVD), molecular beamepitaxy (MBE), physical vapor deposition (PVD), sputtering, plating,evaporation, ion beam deposition, electron beam deposition, laserassisted deposition, and chemical solution deposition.

FIG. 12 is a cross-sectional view of the exemplary structure afterrecessing the RMG stack 1120, according to an embodiment. In oneembodiment, the RMG stack 1120 is reduced to the remaining completed RMGstack 1220 by using a wet or dry etch on the metal material. In oneembodiment, the etching removes a portion of the RMG stack 1120 to makeroom for a cap as follows.

FIG. 13 is a cross-sectional view of an exemplary structure afterdepositing a nitride cap 1320 and performing CMP to stop on the oxidelayers 1110 and 1111, according to an embodiment. In one embodiment,after the completed RMG stack 1220 formation, a nitride cap 1320 isdeposited and then CMP is stopped on the oxide layers 1110 and 1111within the vertically profiled low-k spacer material 910 that surroundsthe nitride cap 1320 (e.g., silicon nitride, etc.). Also shown are thesource junction 1310 and a drain junction 1320.

FIG. 14 is a cross-sectional view of another exemplary structure afteretching the low-k spacer material 910 and depositing a nitride cap 1420and performing CMP to stop on the oxide layers 1110 and 1111, accordingto an embodiment. In one embodiment, the low-k spacer material 910 isetched after the completed RMG stack 1220 is recessed. In oneembodiment, the nitride cap 1420 (e.g., silicon nitride, etc.)completely covers the completed RMG stack 1220, which is robust forself-aligned contact formation.

FIG. 15 is a cross-sectional view of yet another exemplary structureafter depositing and etching a low-k spacer material 910, according toan embodiment. In one embodiment, after the completed RMG stack 1220 isrecessed, a low-k dielectric material is deposited on to the low-kspacer material 910 and used as a cap 1520 to lower the capacitance. Inone embodiment, the low-k cap 1520 material may be the same or differentthan the low-k spacer 910 material.

Unlike conventional replacement spacer formation processes, one or moreembodiments form the low-k spacer material 910 prior to forming thecompleted RMG stack 1220. Conventional processing exposes the RMG stackto the spacer replacement process steps, which is avoided by theprocessing of one or more embodiments. Removal of all the sacrificiallayers entails dealing with a high aspect ratio for reactive ion etch(RIE)/etch issues, which is bypassed by the processing of one or moreembodiments.

FIG. 16 illustrates a block diagram for a process 1600 for forming asemiconductor structure, according to one embodiment. In one embodiment,in block 1610 a dummy gate stack is formed on a substrate (e.g.,substrate 100, FIG. 1) including a sacrificial spacer material deposited(e.g., sacrificial spacer portions 210 and 211, FIG. 2) on theperipheral of the dummy gate stack. In block 1620 the dummy gate stackis partially recessed. In block 1630, the sacrificial spacer is etcheddown (resulting in remaining sacrificial spacer portions 610 and 611,FIG. 6) to the partially recessed dummy gate stack. In one embodiment,in block 1640 remaining portions of the sacrificial spacer is etchedleaving gaps around and above a remaining portion of the dummy gatestack.

In one embodiment, in block 1650 a first low-k spacer portion and asecond low-k spacer portion (e.g., the low-k material 810, FIG. 8) areformed to fill gaps around the remaining portions of the dummy gatestack and extending vertically along a sidewall of a dummy gate cavity.In one embodiment, in block 1660 the first low-k spacer portion and thesecond low-k spacer portion are etched. In block 1670 a poly pullprocess is performed on the remaining portions of the dummy gate stack.In one embodiment, in block 1680 an RMG structure (e.g., RMG stack 1120,FIG. 11, completed RMG stack 1220, FIG. 12) is formed with the firstlow-k spacer portion and the second low-k spacer portion (which arealready formed prior to the RMG structure formation).

In one embodiment, process 1600 may provide that forming the dummy gatestack includes forming a source junction on the substrate adjacent thefirst dielectric spacer portion and a drain junction on the substrateadjacent the second dielectric spacer portion, and depositing an oxidelayer over the source junction and the drain junction. In oneembodiment, process 1600 may include forming a silicon nitride cap layerover the RMG structure and between the first low-k spacer portion andthe second low-k spacer portion, and performing CMP to reduce a heightof the silicon nitride cap layer down to the oxide layer.

In one embodiment, process 1600 may include forming a silicon nitridecap layer over the RMG structure, and performing CMP to reduce a heightof the silicon nitride cap layer to the oxide layer (where the siliconnitride cap layer completely covers the RMG structure). In oneembodiment, process 1600 may further include forming a low-k cap layerover the RMG structure and adjacent to the first low-k spacer portionand the second low-k spacer portion, where a height of the low-k caplayer is reduced to the oxide layer.

Having described preferred embodiments of a method and device for low-kspacer for RMG FET formation (which are intended to be illustrative andnot limiting), it is noted that modifications and variations can be madeby persons skilled in the art in light of the above teachings. It istherefore to be understood that changes may be made in the particularembodiments disclosed which are within the scope of the embodiments asoutlined by the appended claims.

References in the claims to an element in the singular is not intendedto mean “one and only” unless explicitly so stated, but rather “one ormore.” All structural and functional equivalents to the elements of theabove-described exemplary embodiment that are currently known or latercome to be known to those of ordinary skill in the art are intended tobe encompassed by the present claims. No claim element herein is to beconstrued under the provisions of 35 U.S.C. section 112, sixthparagraph, unless the element is expressly recited using the phrase“means for” or “step for.”

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the embodiments.As used herein, the singular forms “a”, “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises”and/or “comprising,” when used in this specification, specify thepresence of stated features, steps, operations, elements, materials,and/or components, but do not preclude the presence or addition of oneor more other features, steps, operations, elements, materials,components, and/or groups thereof.

The corresponding structures, materials, acts, and equivalents of allmeans or step plus function elements in the claims below are intended toinclude any structure, material, or act for performing the function incombination with other claimed elements as specifically claimed. Thedescription of the embodiments has been presented for purposes ofillustration and description, but is not intended to be exhaustive orlimited to the embodiments in the form disclosed. Many modifications andvariations will be apparent to those of ordinary skill in the artwithout departing from the scope and spirit of the invention. Theembodiment were chosen and described in order to best explain theprinciples of the embodiments and the practical application, and toenable others of ordinary skill in the art to understand the embodimentswith various modifications as are suited to the particular usecontemplated.

What is claimed is:
 1. A semiconductor structure comprising: asemiconductor material portion located on a substrate and extendingalong a lengthwise direction; a gate stack overlying a portion of thesemiconductor material portion; a first low-k spacer portion and asecond low-k spacer portion abutting the gate stack and spaced from eachother by the gate stack along said lengthwise direction, wherein thefirst low-k spacer portion and the second low-k spacer portion are eachformed around a recessed dummy gate structure and extend verticallyalong a sidewall of the recessed dummy gate structure prior to removalof the recessed dummy gate structure, each low-k spacer portioncomprising a bottom section having a corresponding width that isconstant and a top section having a corresponding width that tapers, thefirst low-k spacer portion coupled to a first oxide layer and the secondlow-k spacer portion coupled with a second oxide layer, the first low-kspacer portion and the second low-k spacer portion coupled to areplacement metal gate (RMG) structure that is disposed between thefirst low-k spacer portion and the second low-k spacer portion andcomposed of a high-k material having a dielectric constant greater thansilicon oxide; and a low-k cap layer over the RMG structure, the firstlow-k spacer portion and the second low-k spacer portion.
 2. Thesemiconductor structure of claim 1, further comprising: a sourcejunction coupled to the first oxide layer and the first low-k spacerportion; and a drain junction coupled to the second oxide layer and thesecond low-k spacer portion; wherein the RMG structure having a topportion and a bottom portion, and the RMG structure has a width that iswider at the top portion than at the bottom portion.
 3. Thesemiconductor structure of claim 1, wherein: each bottom section of eachlow-k spacer portion has a constant width from a top of the bottomsection to a bottom of the bottom section, and each top section of eachlow-k spacer portion has a width that tapers from a bottom of the topsection to a top of the top section; each bottom section of each low-kspacer portion is thicker in width than any part of a top section of thelow-k spacer portion, and the bottom section of the low-k spacer portionis vertically flush against a sidewall of the recessed dummy gatestructure, such that the entirety of the top section is narrower thanthe bottom section, resulting in a gap between the sidewall of therecessed dummy gate structure and the top section of the low-k spacerportion; and a cavity formed between the first low-k spacer portion andthe second low-k spacer portion after removal of the recessed dummy gatestructure is wider at a top section of the cavity than a bottom sectionof the cavity, the bottom section of the cavity having a constant widththat is thicker than any part of the top section of the cavity.
 4. Thesemiconductor structure of claim 1, wherein chemical-mechanicalplanarization (CMP) is used to reduce a height of the low-k cap layer toan oxide layer.
 5. The semiconductor structure of claim 1,chemical-mechanical planarization (CMP) is used to reduce a height ofthe low-k cap layer to an oxide layer, and the low-k cap layercompletely covers the gate stack.
 6. The semiconductor structure ofclaim 1, wherein a height of the low-k cap layer is reduced to an oxidelayer.